00520nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002200092245007200114260003200186300002000218490003300238856010300271IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819471833 (Print)  cIIA Library  aVeiko, Vadim, ed. 0aFundamentals of Laser Assisted Micro- and Nanotechnologiesh[eBook]  aWashington, USAbSPIEc2008  aOnline resource  aProceedings of SPIE; V. 6985  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/6985yClick Here to Access eBook