Veiko, Vadim, ed. <br/><br/>
Fundamentals of Laser Assisted Micro- and Nanotechnologies  [eBook] 

 - Washington, USA  SPIE  2008 
 - Online resource 
 - Proceedings of SPIE; V. 6985 .
<br/><br/><label>ISBN: </label>9780819471833 (Print)