@book{25591,
	author = {Veiko, Vadim, ed.},
	title = {Fundamentals of Laser Assisted Micro- and Nanotechnologies},
	publisher = {SPIE},
	year = {2008},
	series = {Proceedings of SPIE; V. 6985},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6985}
}