Descour, Michael, ed. <br/><br/>
Functional Integration of Opto-Electro-Mechanical Devices and Systems II  [eBook] 

 - Washington, USA  SPIE  2002 
 - Online resource 
 - Proceedings of SPIE; V. 4647 .
<br/><br/><label>ISBN: </label>9780819443861 (Print)