@book{25584,
	author = {Descour, Michael, ed.},
	title = {Functional Integration of Opto-Electro-Mechanical Devices and Systems II},
	publisher = {SPIE},
	year = {2002},
	series = {Proceedings of SPIE; V. 4647},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4647}
}