00765nam a2200181Ia 4500003000900000008004100009020002600050040001600076100003300092245008300125260003200208300002000240490003300260856010300293942000700396999001700403952016300420IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819439628 (Print)  cIIA Library  aDescour, Michael, ed.943590 0aFunctional Integration of Opto-Electro-Mechanical Devices and Systemsh[eBook]  aWashington, USAbSPIEc2001  aOnline resource  aProceedings of SPIE; V. 4284  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/4284yClick Here to Access eBook  cEB  c25583d25583  00104070aBANbBANd2011-07-01eSPIEhV. 4284l0pEB5043r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/4284w2021-11-05yEB