TY  - BOOK
AU  - Descour, Michael, ed.
TI  - Functional Integration of Opto-Electro-Mechanical Devices and Systems
T2  - Proceedings of SPIE; V. 4284
SN  - 9780819439628 (Print)
PY  - 2001///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4284
ER  -