00535nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002600092245008300118260003200201300002000233490003300253856010300286IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819439628 (Print)  cIIA Library  aDescour, Michael, ed. 0aFunctional Integration of Opto-Electro-Mechanical Devices and Systemsh[eBook]  aWashington, USAbSPIEc2001  aOnline resource  aProceedings of SPIE; V. 4284  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/4284yClick Here to Access eBook