00527nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002000092245008100112260003200193300002000225490003300245856010300278IN-BaIIA211028s9999 xx s 000 0 eng d a9780819473646 (Print) cIIA Library aFei, Yetai, ed. 0aFourth International Symposium on Precision Mechanical Measurementsh[eBook] aWashington, USAbSPIEc2008 aOnline resource aProceedings of SPIE; V. 7130 uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/7130yClick Here to Access eBook