@book{25433,
	author = {Stover, John, ed.},
	title = {Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II},
	publisher = {SPIE},
	year = {1998  },
	series = {Proceedings of SPIE; V. 3275},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3275}
}