TY  - BOOK
AU  - Stover, John, ed.
TI  - Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays
T2  - Proceedings of SPIE; V. 2862
SN  - 9780819422507 (Print)
PY  - 1996///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2862
ER  -