00571nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002200092245012300114260003200237300002000269490003300289856010300322IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819422507 (Print)  cIIA Library  aStover, John, ed. 0aFlatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displaysh[eBook]  aWashington, USAbSPIEc1996  aOnline resource  aProceedings of SPIE; V. 2862  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/2862yClick Here to Access eBook