Stover, John, ed. <br/><br/>
Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays  [eBook] 

 - Washington, USA  SPIE  1996 
 - Online resource 
 - Proceedings of SPIE; V. 2862 .
<br/><br/><label>ISBN: </label>9780819422507 (Print)