@book{25432,
	author = {Stover, John, ed.},
	title = {Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays},
	publisher = {SPIE},
	year = {1996},
	series = {Proceedings of SPIE; V. 2862},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2862}
}