00768nam a2200181Ia 4500003000900000008004100009020002600050040001600076100002700092245009000119260003400209300002000243490003300263856010300296942000700399999001700406952016300423IN-BaIIA211028s9999 xx s 000 0 eng d a9780819448262 (Print) cIIA Library aFilachev, Anatoly, ed. 0aFifth Seminar on Problems of Theoretical and Applied Electron and Ion Opticsh[eBook] aWashington, USAbSPIEc2003  aOnline resource aProceedings of SPIE; V. 5025 uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/5025yClick Here to Access eBook cEB c25410d25410 00104070aBANbBANd2011-07-01eSPIEhV. 5025l0pEB4870r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/5025w2021-11-05yEB