TY  - BOOK
AU  - Miyamoto, Isamu, ed.
TI  - Fifth International Symposium on Laser Precision Microfabrication
T2  - Proceedings of SPIE; V. 5662
SN  - 9780819456236 (Print)
PY  - 2004///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5662
ER  -