00792nam a2200193Ia 4500003000900000008004100009020002600050020002700076040001600103100003000119245007000149260003200219300002000251490003400271856010400305942000700409999001700416952016500433IN-BaIIA211028s9999 xx s 000 0 eng d a9781510622708 (Print) a9781510622715 (Online) cIIA Library aRascher, Rolf, ed.943435 0aFifth European Seminar on Precision Optics Manufacturingh[eBook] aWashington, USAbSPIEc2018 aOnline resource aProceedings of SPIE; V. 10829 uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/10829yClick Here to Access eBook cEB c25383d25383 00104070aBANbBANd2011-07-01eSPIEhV. 10829l0pEB4843r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/10829w2021-11-05yEB