00801nam a2200193Ia 4500003000900000008004100009020002600050020002700076040001600103100003500119245007400154260003200228300002000260490003400280856010400314942000700418999001700425952016500442IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510627529 (Print)  a9781510627536 (Online)  cIIA Library  adu Plessis, Monuko, ed.943434 0aFifth Conference on Sensors, MEMS, and Electro-Optic Systemsh[eBook]  aWashington, USAbSPIEc2019  aOnline resource  aProceedings of SPIE; V. 11043  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/11043yClick Here to Access eBook  cEB  c25381d25381  00104070aBANbBANd2011-07-01eSPIEhV. 11043l0pEB4841r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/11043w2021-11-05yEB