@book{25230,
	author = {Naulleau, Patrick, ed.},
	title = {Extreme Ultraviolet Lithography 2020},
	publisher = {SPIE},
	year = {2020},
	series = {Proceedings of SPIE; V. 11517},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11517}
}