@book{25226,
	author = {Panning, Eric, ed.},
	title = {Extreme Ultraviolet (EUV) Lithography VII},
	publisher = {SPIE},
	year = {2016},
	series = {Proceedings of SPIE; V. 9776},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9776}
}