@book{25225,
	author = {Wood, Obert, ed.},
	title = {Extreme Ultraviolet (EUV) Lithography VI},
	publisher = {SPIE},
	year = {2015},
	series = {Proceedings of SPIE; V. 9422},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9422}
}