00500nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002100092245005300113260003200166300002000198490003300218856010300251IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819499714 (Print)  cIIA Library  aWood, Obert, ed. 0aExtreme Ultraviolet (EUV) Lithography Vh[eBook]  aWashington, USAbSPIEc2014  aOnline resource  aProceedings of SPIE; V. 9048  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/9048yClick Here to Access eBook