@book{25224,
	author = {Wood, Obert, ed.},
	title = {Extreme Ultraviolet (EUV) Lithography V},
	publisher = {SPIE},
	year = {2014},
	series = {Proceedings of SPIE; V. 9048},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9048}
}