@book{25223,
	author = {Goldberg, Kenneth, ed.},
	title = {Extreme Ultraviolet (EUV) Lithography IX},
	publisher = {SPIE},
	year = {2018},
	series = {Proceedings of SPIE; V. 10583},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10583}
}