@book{25221,
	author = {Naulleau, Patrick, ed.},
	title = {Extreme Ultraviolet (EUV) Lithography III},
	publisher = {SPIE},
	year = {2012},
	series = {Proceedings of SPIE; V. 8322},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/8322}
}