@book{25220,
	author = {La Fontaine, Bruno, ed.},
	title = {Extreme Ultraviolet (EUV) Lithography II},
	publisher = {SPIE},
	year = {2011},
	series = {Proceedings of SPIE; V. 7969},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7969}
}