@book{25214,
	author = {Waynant, Ronald, ed.},
	title = {Excimer Lasers: Their Applications & New Frontiers in Lasers},
	publisher = {SPIE},
	year = {1984},
	series = {Proceedings of SPIE; V. 0476},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0476}
}