@book{25212,
	author = {Shields, Harry, ed.},
	title = {Excimer Lasers, Optics, and Applications},
	publisher = {SPIE},
	year = {1997},
	series = {Proceedings of SPIE; V. 2992},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2992}
}