00713nam a2200181Ia 4500003000900000008004100009020002600050040001600076100002600092245003900118260003200157300002000189490003300209856010300242942000700345999001700352952016200369IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780892527458 (Print)  cIIA Library  aLuk, Ting, ed.943302 0aExcimer Lasers and Opticsh[eBook]  aWashington, USAbSPIEc1987  aOnline resource  aProceedings of SPIE; V. 0710  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0710yClick Here to Access eBook  cEB  c25211d25211  00104070aBANbBANd2011-07-01eSPIEhV. 710l0pEB4671r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0710w2021-11-05yEB