00494nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002300092245004500115260003200160300002000192490003300212856010300245IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819400581 (Print)  cIIA Library  aBasting, Dirk, ed. 0aExcimer Lasers and Applicationsh[eBook]  aWashington, USAbSPIEc1989  aOnline resource  aProceedings of SPIE; V. 1023  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/1023yClick Here to Access eBook