@book{25208,
	author = {Basting, Dirk, ed.},
	title = {Excimer Lasers and Applications},
	publisher = {SPIE},
	year = {1989},
	series = {Proceedings of SPIE; V. 1023},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1023}
}