@book{25207,
	author = {Piwczyk, Bernhard, ed.},
	title = {Excimer Laser Materials Processing and Beam Delivery Systems},
	publisher = {SPIE},
	year = {1991},
	series = {Proceedings of SPIE; V. 1377},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1377}
}