TY - BOOK AU - Vo-Dinh, Tuan, ed. TI - Environmental and Process Monitoring Technologies T2 - Proceedings of SPIE; V. 1637 SN - 9780819407832 (Print) PY - 1992/// CY - Washington, USA PB - SPIE UR - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1637 ER -