00556nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002700092245010300119260003200222300002000254490003300274856010300307IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819441829 (Print)  cIIA Library  aKnystautas, Emile, ed. 0aEngineering Thin Films with Ion Beams, Nanoscale Diagnostics, and Molecular Manufacturingh[eBook]  aWashington, USAbSPIEc2001  aOnline resource  aProceedings of SPIE; V. 4468  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/4468yClick Here to Access eBook