Knystautas, Emile, ed. <br/><br/>
Engineering Thin Films with Ion Beams, Nanoscale Diagnostics, and Molecular Manufacturing  [eBook] 

 - Washington, USA  SPIE  2001 
 - Online resource 
 - Proceedings of SPIE; V. 4468 .
<br/><br/><label>ISBN: </label>9780819441829 (Print)