@book{25146,
	author = {Knystautas, Emile, ed.},
	title = {Engineering Thin Films with Ion Beams, Nanoscale Diagnostics, and Molecular Manufacturing},
	publisher = {SPIE},
	year = {2001},
	series = {Proceedings of SPIE; V. 4468},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4468}
}