TY  - BOOK
AU  - Bencher, Chris, ed.
TI  - Emerging Patterning Technologies
T2  - Proceedings of SPIE; V. 10144
SN  - 9781510607392 (Print)
PY  - 2017///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10144
ER  -