Bencher, Chris, ed. <br/><br/>
Emerging Patterning Technologies  [eBook] 

 - Washington, USA  SPIE  2017 
 - Online resource 
 - Proceedings of SPIE; V. 10144 .
<br/><br/><label>ISBN: </label>9781510607392 (Print) 9781510607408 (Online)