TY  - BOOK
AU  - Schellenberg, Frank, ed.
TI  - Emerging Lithographic Technologies XII
T2  - Proceedings of SPIE; V. 6921
SN  - 9780819471062 (Print)
PY  - 2008///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6921
ER  -