@book{25078,
	author = {Schellenberg, Frank, ed.},
	title = {Emerging Lithographic Technologies XII},
	publisher = {SPIE},
	year = {2008},
	series = {Proceedings of SPIE; V. 6921},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6921}
}