00502nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002500092245005100117260003200168300002000200490003300220856010300253IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819466365 (Print)  cIIA Library  aLercel, Michael, ed. 0aEmerging Lithographic Technologies XIh[eBook]  aWashington, USAbSPIEc2007  aOnline resource  aProceedings of SPIE; V. 6517  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/6517yClick Here to Access eBook