TY  - BOOK
AU  - Lercel, Michael, ed.
TI  - Emerging Lithographic Technologies X
T2  - Proceedings of SPIE; V. 6151
SN  - 9780819461940 (Print)
PY  - 2006///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6151
ER  -