TY  - BOOK
AU  - Mackay, R. Scott, ed.
TI  - Emerging Lithographic Technologies VIII
T2  - Proceedings of SPIE; V. 5374
SN  - 9780819452870 (Print)
PY  - 2004///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5374
ER  -