TY  - BOOK
AU  - Engelstad, Roxann, ed.
TI  - Emerging Lithographic Technologies VII
T2  - Proceedings of SPIE; V. 5037
SN  - 9780819448422 (Print)
PY  - 2003///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5037
ER  -