TY  - BOOK
AU  - Engelstad, Roxann, ed.
TI  - Emerging Lithographic Technologies VI
T2  - Proceedings of SPIE; V. 4688
SN  - 9780819444349 (Print)
PY  - 2002///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4688
ER  -