00504nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002700092245005100119260003200170300002000202490003300222856010300255IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819444349 (Print)  cIIA Library  aEngelstad, Roxann, ed. 0aEmerging Lithographic Technologies VIh[eBook]  aWashington, USAbSPIEc2002  aOnline resource  aProceedings of SPIE; V. 4688  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/4688yClick Here to Access eBook