@book{25073,
	author = {Engelstad, Roxann, ed.},
	title = {Emerging Lithographic Technologies VI},
	publisher = {SPIE},
	year = {2002},
	series = {Proceedings of SPIE; V. 4688},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4688}
}