@book{25072,
	author = {Dobisz, Elizabeth, ed.},
	title = {Emerging Lithographic Technologies V},
	publisher = {SPIE},
	year = {2001},
	series = {Proceedings of SPIE; V. 4343},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4343}
}