TY  - BOOK
AU  - Mackay, R. Scott, ed.
TI  - Emerging Lithographic Technologies IX
T2  - Proceedings of SPIE; V. 5751
SN  - 9780819457318 (Print)
PY  - 2005///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5751
ER  -