@book{25071,
	author = {Mackay, R. Scott, ed.},
	title = {Emerging Lithographic Technologies IX},
	publisher = {SPIE},
	year = {2005},
	series = {Proceedings of SPIE; V. 5751},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5751}
}